High capacity robot arm

ABSTRACT

A robot arm includes a wrist, an end effector, and an adjustable joint coupling the end effector to the wrist. The adjustable joint includes a member received in a socket. In one example, the member is a ball. In another example, the member is a tang. In both examples, an upper flange and a lower flange can be used to couple the wrist to a forearm.

RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/795,736 filed Mar. 12, 2013, and claims benefit of priority theretounder 35 U.S.C. §§119, 120, 363, 365 and 37 C.F.R. §§1.55 and 1.78, andU.S. patent application Ser. No. 13/795,736, which claims benefit of andpriority to U.S. Provisional Application Ser. No. 61/668,661 filed Jul.6, 2012 under 35 U.S.C. §§119, 120, 363, 365, and 37 C.F.R. §1.55 and§1.78 and is incorporated herein by this reference.

FIELD OF THE INVENTION

The invention relates to a robot arm for transporting wafers, solarpanels, liquid crystal display screens, and other substrates.

BACKGROUND OF THE INVENTION

Various substrate robot arms are known. Some include a shoulder drivenby drive isolated from the vacuum environment. A forearm linkarticulates with respect to the shoulder and a wrist link articulateswith respect to the forearm. A substrate holding/carrying end effectoris fixed to the wrist.

SUMMARY OF THE INVENTION

It is desirable to be able to adjust the end effector attachment to thewrist. An end effector adjustment in elevation is desirable. An endeffector adjustment in roll and/or pitch is also desirable. Furthermore,improvements in the connection of the wrist to the forearm aredesirable.

In examples of the invention, the end effector is coupled to the wristvia an adjustable joint. In some examples, a stronger, higher capacityarm is realized by a unique connection between the wrist and theforearm.

Featured is a robot arm comprising at least first and second joinedlinks and a driven rotating drum at one end of the first link. Otherdrives or any suitable joint driven structure may be used. Spaced upperand lower flanges are both connected to the second link and to therotating drum. Preferably, the top flange is connected to the secondlink and to the lower flange. In one example, the first link is aforearm the second link is a wrist. The end of the forearm is typicallyrounded and so the first flange may include a curved depending skirtspaced from the rounded forearm link end. A plate extends laterally fromthe depending curved skirt which is attached to the drum.

There may be a wafer handling end effector connected to the wrist andadjustment means for the end effector for adjusting the pitch and rollof the end effector with respect to the wrist link independently. In oneexample, brackets are fastened to the wrist and to the end effector eachwith an adjustable set screw for setting the roll of the end effector.

There can be a ball joint between the end effector and the wrist which,in one design, includes a pin extending rearwardly from the end effectorthrough an ear of the wrist. In one version, the end effector has a tangextending rearwardly therefrom which is received in a concave receptaclein the wrist. The tang surrounds the pin. The tang is typically fastenedto the wrist and an adjustable set screw in the wrist abuts the tang foradjusting the pitch of the end effector.

Also featured is a robot arm comprising a wrist, an end effector coupledto the wrist via an adjustable joint, and a leveling adjustment at theadjustable joint.

In one version, the adjustable joint includes a socket on the wrist andan end effector tang received in the socket. Further included may bebrackets fastening the end effector to the wrist with adjustable setscrews varying the orientation of the end effector with respect to thebrackets. The socket may include an ear and the tang may include a pinreceived in the ear. A set screw in the wrist preferably abuts the tangfor adjusting the pitch of the end effector.

In another design, the adjustable joint includes a socket on the endeffector receiving a ball of the wrist. Further included may be a sleevebetween the ball and the socket. The sleeve may be in a plurality ofsections and may have a shoulder seated on the socket periphery. A setscrew in the wrist may abut the end effector for leveling the endeffector. The socket can be split and tightenable about the ball.

In another design, an extension extends between the end effector and thewrist. There may be two spaced end effectors secured to two spacedextensions. The end effectors may each include a stationary blocksecured to the extension and an adjustable block adjustably secured tothe stationary block. The leveling adjustment may include a bore in theadjustable block receiving a fastener from the stationary block and aspring between the adjustable block and the stationary block. Furtherincluded may be pins of the stationary block received in bores in theadjustable block.

In some embodiments, a forearm has a drive for the wrist. The drive maybe a rotating drum. Preferably, there is an upper flange and a lowerflange coupling the wrist to the rotating drum. In some versions, thetop flange is secured to the lower flange.

Also featured is a robot arm comprising a wrist, an end effector, and anadjustable joint coupling the end effector to the wrist. The adjustablejoint includes a member received in a socket. In one embodiment, themember is a ball. In another embodiment, the member is a tang. In bothdesigns, there may be an upper flange and a lower flange coupling thewrist to a forearm.

The disclosed embodiment, however, in other embodiments, need notachieve all these objectives and the claims hereof should not be limitedto structures or methods capable of achieving these objectives.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

Other objects, features and advantages will occur to those skilled inthe art from the following description of a preferred embodiment and theaccompanying drawings, in which:

FIG. 1 is a schematic three dimensional exploded view showing theprimary components associated with one version of a robot arm inaccordance with an example of the disclosed embodiment;

FIG. 2 is a schematic three dimensional exploded bottom view of thecomponents shown in FIG. 1;

FIG. 3 is a schematic three dimensional bottom view of an assembledrobot arm in accordance with an example of the invention;

FIG. 4 is a schematic three dimensional partially cut away view showingan example of the leveling means or features in one version of thedisclosed embodiment;

FIG. 5 is a schematic three dimensional top view showing an example of arobot arm in accordance with an example of the disclosed embodiment;

FIG. 6 is a highly schematic three dimensional side view of a robot armjoint in accordance with examples of the disclosed embodiment;

FIG. 7 is a schematic three dimensional view of an assembled wrist linkand end effector in accordance with an example of the invention;

FIG. 8 is an exploded isometric view of the wrist link and end effectorof FIG. 7 having features in one version of the disclosed embodiment;

FIG. 9 is a schematic three dimensional view of an assembled wrist linkand end effector in accordance with an example of the invention; and

FIG. 10 is an exploded isometric view of the wrist link and end effectorof FIG. 9 having features in one version of the disclosed embodiment.

DETAILED DESCRIPTION OF THE INVENTION

Aside from the embodiment or embodiments disclosed below, the disclosedembodiment is capable of other embodiments and of being practiced orbeing carried out in various ways. Thus, it is to be understood that thedisclosed embodiment is not limited in its application to the details ofconstruction and the arrangements of components set forth in thefollowing description or illustrated in the drawings. If only oneembodiment is described herein, the claims hereof are not to be limitedto that embodiment.

Moreover, the claims hereof are not to be read restrictively unlessthere is clear and convincing evidence manifesting a certain exclusion,restriction, or disclaimer.

As shown in FIG. 1, in one example, a robot arm 10 includes a shoulderor upper arm link 20 typically driven by a drive subsystem. The shoulderlink 20 drives the forearm link 22 which, in turn drives the wrist link24 via driven rotating drum 26 shown. In alternate aspects, other drivesare possible. Spaced upper 28 and lower 30 flanges are connected to baththe wrist link 24 and to rotating drum 26 at the end of the forearm inlink. The result is a stronger, higher capacity arm. In one versionshown, the upper flange 28 skirt 100 is rounded and fastened to thewrist link 24 via the lower flange 30. In one particular example, thebottom flange extends rearwardly from the bottom of the wrist link andis a component of the wrist link.

Referring also to FIGS. 2 through 5, an end effector 32 may be coupledto the wrist link 24 via an adjustable joint with a leveling adjustment.End effector 32 may be adjustable in pitch and roll independently. Inthe example shown, there are brackets 34, 36 with fasteners or shoulderscrews 38, 40 fastened to the wrist distal sides 42, 44 and fasteners orshoulder screws 46, 48 fastened to the end effector proximate face 50,52. Each bracket 34, 36 features one or more adjustable set screws 54,56, 58, 60 for setting the roll of the end effector. Also, there issocket joint between the end effector and the wrist with a pin 62extending rearwardly from the end effector 32 through an ear 64 having asocket receiving portion of the wrist 24. The member or tang 66 aboutthe pin is received in a concave socket 68, FIG. 2 at the distal end ofthe wrist 24 and fastened to the wrist via the screw or shoulder screw70. The set screw 72 adjacent to the shoulder screw 70 in the wrist 24abuts the tang 66 for adjusting the pitch of the end effector 32.

FIG. 6 depicts how, in other designs, link 24′ includes spaced flangeportions 28′, 30′ coupled to a rotating or driven assembly such as adrum 26 which typically is a component of an adjacent robot arm link.Fasteners or the like can be used to fasten the flanges to the upper andlower surfaces of the drum. Such a joint could be at the wrist, and/orthe elbow, and/or the shoulder. In another example, one link, forexample a forearm, drives numerous other links, for example, endeffectors. Such a joint can be used multiple times in such anembodiment.

Referring now to FIGS. 7 and 8, there are shown alternate embodiments ofwrist 110 and end effector 112. Wrist 110 includes upper and lowerflanges 114, 116 suitable for being fastened to drum 26 of forearm 22 aspreviously described. Wrist 110 has ball portion 118 fastened theretowith screws 120. Ball 118 is received in socket 132. A split sphericalsleeve portions 122, 124 have spherical inner faces 126, 128 that matewith spherical outer face 130 of ball portion 118. Wrist 112, socket 132is adapted to receive the split sleeve sections 122, 124 where assemblymay require the sleeve sections 122, 124 to be assembled to the ballportion 118 and then slid into or otherwise engaged in socket 132 suchthat end effector 112 may be rotatable with respect to ball portion 118.

Sleeve shoulders 134, 136 may seat on upper face 138 of socket 132, forexample, to locate the spherical joint in elevation. The fit of sleevesections 122, 124, ball portion 118 and socket 132 may be loose, line toline or interference as needed.

Screws 140, 142 fasten wrist link 110 to end effector 112 at the upperfacing face 144 of end effector 110 where set screws 146, 148 maysimilarly interface with the upper face 144 and used in combination withscrews 140, 142 provide adjustment and leveling of end effector 112relative to wrist 110. Socket 132 may have split cut 150 and lockingscrew 152 that engages a clearance hole 154 in flange 154 of split cut150 and a threaded portion of flange 156 of split cut 150. Uponcompletion of leveling and adjustment of end effector 112 relative towrist 110, screw 152 may be tightened to lock the position of the endeffector 112, sleeve sections 122, 124 and ball portion 118 relative toeach other.

Referring now to FIGS. 9 and 10, there are shown alternate embodimentsof wrist 210 and end effector 212. Wrist 210 may similarly include upperand lower flanges suitable for being fastened to drum 26 of forearm 22as previously described. End effector 212 has first and secondextensions 214, 216 coupled to wrist 210 with screws 218, 220respectively. A rear support 222 supports a rear edge of substrate 224and is similarly coupled to wrist 210. First and second extensions 214,216 have first and second adjustable end effectors 226, 228. Here, firstand second adjustable end effectors 226, 228 may have similar featuresas will be described with respect to second adjustable support 228.Adjustable effector 228, FIG. 10 has stationary block 230 coupled toextension 216 with plate 232 and fasteners 234. Adjustable block 236 hasbores 238, 240 configured to accept pins 242, 244 pressed into block230. Counter bore 246 of adjustable block 236 has a bore portion andseat portion configured to accept spring 248 and a threaded portionconfigured to accept adjustment screw 250. In this manner, rotation ofadjustment screw 250 adjusts the elevation of the edge of substrate 224supported. Similarly adjustment of end effector 226 adjusts theelevation of the edge of substrate 224 supported.

Although specific features are shown in some drawings and not in others,this is for convenience only as each feature may be combined with any orall of the other features. The words “including”, “comprising”,“having”, and “with” as used herein are to be interpreted broadly andcomprehensively and are not limited to any physical interconnection.Moreover, any embodiments disclosed in the subject application are notto be taken as the only possible embodiments.

In addition, any amendment presented during the prosecution of thepatent application for this patent is not a disclaimer of any claimelement presented in the application as filed: those skilled in the artcannot reasonably be expected to draft a claim that would literallyencompass all possible equivalents, many equivalents will beunforeseeable at the time of the amendment and are beyond a fairinterpretation of what is to be surrendered (if anything), the rationaleunderlying the amendment may bear no more than a tangential relation tomany equivalents, and/or there are many other reasons the applicant cannot be expected to describe certain insubstantial substitutes for anyclaim element amended.

Other embodiments will occur to those skilled in the art and are withinthe following claims.

What is claimed is:
 1. A robot arm comprising: a wrist; an end effectorcoupled to the wrist via an adjustable joint including a rotatingportion for rotating the end effector with respect to the wrist and atwo point mount for adjusting and leveling the end effector relative tothe wrist; and a leveling adjustment at the adjustable joint.
 2. Therobot arm of claim I in which the rotating portion includes a socket onone of the end effectors and the wrist and a ball on the other of theend effector and the wrist received in the socket.
 3. The robot an ofclaim 1 in which the adjustable joint includes a socket on the wrist andan end effector tang received in the socket.
 4. The robot arm of claim 3in which the socket includes an ear and the tang includes a pin receivedin the ear.
 5. The robot arm of claim 3 further including a set screw inthe wrist abutting the tang for adjusting the pitch of the end effector.6. The robot arm of claim 2 further including a sleeve between the balland the socket.
 7. The robot arm of claim 6 in which the sleeve is in aplurality of sections.
 8. The robot arm of claim 7 in which the sleevehas a shoulder seated on the socket periphery.
 9. The robot arm of claim2 further including a set screw in the wrist abutting the end effectorfor leveling the end effector.
 10. The robot arm of claim 2 in which thesocket is split and tightenable about the ball.
 11. The robot arm ofclaim 1 further including an extension between the end effector and thewrist.
 12. The robot arm of claim 11 in which there are two spaced endeffectors secured to two spaced extensions.
 13. The robot arm of claim11 in which the end effectors include a stationary block secured to theextension and an adjustable block adjustably secured to the stationaryblock.
 14. The robot arm of claim 13 in the leveling adjustment includesa bore in the adjustable block receiving a fastener from the stationaryblock and a spring between the adjustable block and the stationaryblock.
 15. The robot arm of claim 13 further including pins of thestationary block received in bores in the adjustable block.
 16. A robotarm comprising: a wrist; an end effector; and an adjustable jointcoupling the end effector to the wrist, the adjustable joint including amember received in a socket.
 17. The robot arm of claim 16 in which themember is a tang.
 18. A robot arm comprising: a wrist; an end effectorcoupled to the wrist via an adjustable joint; a leveling adjustment atthe adjustable joint; a forearm with a drive for the wrist; and an upperflange and a lower flange coupling the wrist to the forearm drive.